Physical challenges and novel concepts for the optimization of tunnel FETs


Accomplished Results

  • Electrostatic doping as a replacement for chemical doping was studied. Buried tri-gate substrates were realized that allow comparing and further investigating nanostructures as materials for TFETs. (RWTH)
  • The sensitivity of TFETs on device parameter fluctuations was elaborated and device structures investigated to mitigate device variability. (EPFL, IU-NET)
  • Silicon/strained SiGe heterojunction TFETs were realized experimentally and investigated with simulations. (FZJ)
  • Electron-hole bilayer TFETs have been studied and it was shown that in principle very steep inverse subthreshold slopes can be achieved due to the stair-case density of states in 2D systems. (EPFL)
  • Type II heterojunction TFETs have been investigated experimentally in the InAs-Si heterosystem that show overall a good performance in terms of the trade-offs between high Ion versus small slope and high Ion/Ioff ratio. (IBM)
  • • Superlattice energy filter FETs were studied that realize a band-pass filtered Fermi distribution function employing a miniband that is generated with an e.g. InGaAs/InAlAs or InGaAs/InP superlattice. Simulations have shown that the device exhibits inverse subthreshold slopes down to ~10mV/dec and MOSFET-like on-currents. (IU-NET)
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Fig. 1. Schematics of the electron-hole bilayer TFET [1].
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Fig. 2. Transfer characteristics of superlattice energy filter FETs [2]
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Fig. 3. Device structure and TEM image of an InAs-Si heterostructure TFET [3]
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Fig. 4. SEM picture of tri-gate structure [4]
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Fig 5. Schematics of a strained silicon/SiGe heterjunction TFET and transfer characteristics [5]


  1. L. Lattanzio, L. De Michielis, and A. M. Ionescu, “Complementary Germanium Electron–Hole Bilayer Tunnel FET for Sub-0.5-V Operation,” IEEE Electron Device Letters, vol. 33, no. 2, pp. 167–169, 2012.
  2. E. Gnani, P. Maiorano, S. Reggiani, A. Gnudi and G. Baccarani, “Performance Limits of Superlattice-Based Steep-Slope Nanowire FETs”, IEDM 2011, pp. 91-94, 2011.
  3. K. E. Moselund, H.Schmid, C.Bessire, M.T.Björk, H. Ghoneim, H.Riel, “InAs–Si Nanowire Heterojunction Tunnel FETs”, IEEE Electron Dev. Lett., vol. 33, 1453, 2012.
  4. J. Knoch and M. Müller, accepted for publication in IEEE Trans. Nanotechnology, 2013.
  5. Q.T. Zhao, J. Hartmann and S. Mantl, “An improved Si tunnel field effect transistor with a buried strained Si1−xGex source, IEEE Electron DEv. Lett., vol. 32, 1480, 2011.